QUANTUM Quartz Ultrapure Deionized Water Heater Trebor’s thin film on quartz electric resistive heating technology is ideal for your ultra high purity DI water heating applications when process control cleanliness and system uptime are of the utmost importance This patented technology utilizes GE 214 semiconductor grade quartz tubes bonded with a resistive metallic film Trebor’s patented sealing technology provides an ultrapure flow path with no elastomer oring seals or particle traps This unique design creates a compact ultra clean heating module with an MTBF greater than 20000 hours US Patent 6677053 6663914 6580061 6544583 6479094 5971402 Other patents pending D LEADING EDGE TECHNOLOGY Patented thinfilm on quartz electrical resistance heater element provides exceptional temperature response and improved reliability over IR heating which requires frequent bulb change outs The proprietary design has no metal exposure and virtually eliminates contamination risk in the event of element failure unlike most immersion style heaters No external air or nitrogen purge is required VERSATILE CONTROL OPTIONS Standard modbus/ TCP offers the industry’s first DI water heater Ethernet control capability Many other remote system monitoring and control options available to meet virtually all communication requirements and protocols COMPACT & CONVENIENT The modular element allows for very compact system design and can be changed out in less than 15 minutes when required LCD color touch screen display provides easy user input and diagnostic feed back HIGH PERFORMANCE Efficient heat transfer and low resident fluid volume produces fast response to changes in flow or temperature set point using multiloop PID control with zero crossfire SSRs ULTRA CLEAN DESIGN High purity flow path of GE 214 semiconductor grade quartz PTFE and PFA with no elastomer orings and no NPT threads or deadlegs to create particle traps SAFETY COMPLIANT TUV third party compliance testing and inspection to CE SEMI S2 & S8 and NFPA79 standards USER EVENT CONTROL Virtually eliminate fluid temperature fluctuations caused by process flow changes Signal the heater of a flow change and within one second the heater will automatically adjust to minimize the effect on process temperature F E AT U R E S & B E N E F I T S t P u r e I n n o v a t i o n

SPECIFICATIONS QUANTUM Quartz Electric DI Water Heater WHY USE HOT DI WATER Hot DI water greatly improves cleaning effectiveness thereby reducing throughput times and water consumption Hot DI water eliminates variable process temperatures common with seasonal fluctuations of ambient water Hot DI water rinsing before entering hot acid baths reduces thermal shock to wafers WHY QUANTUM HEATERS ARE BETTER Quantum DI water heaters use a patented resistive thin film coating on quartz heating element that provides unmatched temperature response to changes in flow rate or process set point This is accomplished with highly efficient heat transfer from the low thermal mass heating element and minimal holdup volume in the module unlike competing technologies that are often prone to extreme temperature overshoot or sluggish response This fast response improves your throughput and minimizes DI water consumption Furthermore Quantum heating elements are failsafe with no metal exposure or disruption to the flow path in the event of element failure With an element MTBF exceeding 20000 hours Quantum heaters will provide you with the industrys most reliable and responsive quartz heating solution available today Heater Type Thin film on quartz electric resistive heating Voltages 208 380 415 480 Volt; 50/60 Hz Temperature Limit 95°C Temperature ± 05°C in most conditions Control Pressure Range 15 to 60 PSI DI water supply Flow Rate 1 to 45 LPM (25 to 12 GPM); systems may be combined to achieve higher flows (Multiple output systems available) Efficiency >98% Element Life >20000 hrs heating modules are factory rebuildable with hardware exchange Control System Zero crossfile SSRs with multiloop PID control Communication Ethernet enabled modbus/TCP (standard) Options modbus/RTU RS232 RS485 DeviceNet Wetted Surfaces GE quartz PTFE & PFA no elastomer Orings Safety Features Low pressure shutdown Low liquid level detection shutdown Redundant over temperature protection Over pressure relief Open thermocouple detection Liquid spill detection Automatic power shutdown EMO GFI/Earth Leakage Certifications SEMI S20703 CE SEMI S80701 NFPA79 Modules FM compliant Warranty Twoyear standard extended warranties available TEMPERATURE RESPONSE CHART TIME TO TEMPERATURE COMPARISON No metal ion contamination risk DI water contacts only quartz PTFE & PFA D Fluid Temperature Output (C) ) C ( e r Temperatu t e l t u O d i Flu 100 90 80 70 60 50 40 30 20 10 0 0 Patented thin film electric resistive heating NO IR bulbs to replace 5 10 15 20 Heating module MTBF > 20000 hours 25 Bypass Flow 30 Time ( Min) 35 Patented seal technology Ultrapure fluid path; NO elastomer Orings NO particle traps Test run on a Quantum 208v 48kW Typical Time to NonBypass Temperature Recovery 30 to 45 Seconds S ystem Output with 80C Set Point Flow ( LPM) Test run on Quantum 208V 48 kW system Typical recovery time is 30 to 45 seconds 90 80 70 60 50 40 30 20 Quantum Performance vs Published Competitor IR Heater 10 0 30 60 90 120 150 180 Time (Seconds) Set Point Competitors Published Typical Response (IR Heater) Trebors Quantum Quartz DI Heater Test Conditions: 75 l/min flow and 85C set point 40 45 50 55 10 9 8 7 6 5 4 3 2 1 0 Flow (LPM)