Configuration Options Select from the following MAXIM 50 Chemical Pump control configurations to meet your exact requirements R Recirculation Discharge Pressure (PSIG) 35 30 25 20 15 10 5 0 5 Designed specifically for wet etch and clean chemical recirculation applications This configuration handles continuous operating temperatures up to 180 °C and air pressure up to 60 psig (42 MPa) Noncentering air control valve for reliable start up and operation 10 0 051 152 253 Time (sec) M50E with Model SS95 M50E without pulsation dampener Like all Maxim pumps the “R” configuration is compatible with pump mounted pulsation dampeners to reduce plumbing vibration and improve filter performance D Chemical Delivery Smartpilot valves will not signal prematurely during high pressure operation This configuration utilizes unique air logic control and polypropylene airside heads designed to handle high head pressures and closed discharge valve conditions Capable of up to 100°C operating temperature and 80 psig (55 MPa) operating pressure Longlasting ceramic noncentering shuttle valve will not stall Noncentering air control valve and smart pilot valve system enables reliable start/stop operation Pump may be operated by turning air supply on/off or by closing valve in discharge line for pointofuse control E External Control U User Configured Control Fiber Optic Cables 25" Length Customer Supplied Sensors: (2) Cycle (2) Leak DPS01 (Sourcing) DPS02 (Sinking) Suitable for either recirculation or chemical delivery applications This base is user configurable with other remote air logic control devices Up to 180 °C operating temperature and 80 psig (55 MPa) air supply pressure Control valves optics sensors are available from Trebor 1/4" NPT 1/4” NPT PLC SOLENOID ACTUATED VALVE Cv > 1 3/8" TUBE Suitable for either chemical recirculation or delivery applications Fiber optic probes provide endofstroke inputs for PLC remote air logic control or pump monitoring This base can also be used with other remote air logic control devices Up to 180 °C operating temperature and 80 psig (55 MPa) air supply Regulated Air Supply Customer or Trebor Supplied 1/4" NPT 1/4” NPT SOLENOID ACTUATED VALVE Cv > 1 3/8" TUBE Regulated Air Supply Typical electronic control setup Typical pneumatic oscillation

MEGA 960 Ideal for high flow recirculation or bulk chemical delivery applications TREBOR’s MEGA 960 is an air operated double diaphragm chemical pump that is ideal for high flow recirculation or bulk chemical delivery applications Like all TREBOR pumps the MEGA 960 utilizes our patented floating PTFE check valves for maximum suction lift It also features our proprietary nostall shuttle valve and ‘smart pilot’ air logic to reliably operate under high head pressures andclosed discharge valve conditions This pump’s fluid path is constructed entirely of PTFE and PFA to ensure the utmost in high purity pumping and chemical compatibility The nonmetallic airside components also make this pump suitable for use in aggressive acid vapor environments Performance Nostall air logic design provides reliable operation in all pump conditions Up to 80 psi operating pressure Flow capacity up to 25 gpm (95 lpm) Handles chemical temperatures up to 100˚C Explosionproof pneumatic operation with clean dry air or nitrogen Dry suction lift to 10 feet (3 meters) water column for better lift of more viscous higher specific gravity chemicals Construction PTFE/PFA fluid path Airside components are constructed of polypropylene/PTFE/PFA/PEEK/alumina ceramic All wetted seals are 100% PTFE standard airside seals are FKM (Viton ® ) additional airside seal options are available US Patent 5370507 patented floating PTFEOring check valve for increased dry suction prime and overall pumping efficiency Non penetrated double layer PFA diaphragm design for longer diaphragm life and safe double chemical containment Simple compact design with externally accessible valves for easy field service and preventive maintenance User or factory serviceable maintenance internal exceeding one year Class 1000 clean room assembled tested and packaged One year warranty *US Patent 5370507 F E A T U R E S