SG1 Nitrogen Gun Product Overview The PFA Nitrogen Gun is suitable for use in high purity semiconductor applications The design utilizes a molded high purity PFA body with precision machined sealing areas Interior surfaces are PFA and a one piece machined modified PTFE diaphragm/poppet This design eliminates the need for elastomer seals while providing excellent flexibility and long life The SG1 is available with 1/4” FNPT or 3/8” Parflare connections Additional options include a 2 or 5 micron filter and a coiled hose assembly Features One piece precision machined diaphragm/ poppet manufactured from the latest technology modified PTFE Provides over five times the flexural life as compared to conventional PTFE Wiper seat for positive through flow shut off and diaphragm to body seal Reversible/removable hanger Benefits High cycle life Lower replacement costs Less downtime Allows hanging in either direction Specifications Materials of Construction: 24 Interior Surfaces PFA Modified PTFE (optional HDPE filter element) External Surfaces PFA PVDF and PET handle retention screw Other Materials Stainless steel spring Pressure Ranges: 0 PSIG (0 bar) to 80 PSIG (55 bar) Pressure range above is for operation at ambient temperature For use at higher temperatures consult Pressure/Temperature chart on page 3 Temperature Ranges: 0° 150° F (17° 66° C) Ambient 0° 200° F (17° 93° C) Fluid Parker Hannifin Corporation Partek Operation Tucson AZ

BRACKETED DIMENSIONS ARE IN mm P A R T E K 520 [1321] 3/8" PARFLARE 123 [3124] 448 [11379] 363 [9220] 1/4" FNPT 25 66 [1664] Model Number End Connection Description SG1 Nitrogen Gun 466 [11831] 380 [9652] SG103 1 / 4" FNPT Spray Gun only ( No Filter) SG104 3 / 8" Parflare Spray Gun only ( No Filter) 590 [14989] SG103X 1 / 4" FNPT Spray Gun with Filter ( Add 2 or 5 for 0 2 or 0 5 Micron Element) SG104X 3 / 8" Parflare Spray Gun with Filter ( Add 2 or 5 for 0 2 or 0 5 Micron Element) 10020161 N/ A 8 FEP Coil only 4 9990114 " 0 5 Micron Replacement Element 4 9990115 " 0 2 Micron Replacement Element FLOW (f 3 h) 140 120 100 80 60 40 20 INLET PRESSURE VS FLOW PRESSURE (bar) 7 14 21 28 35 42 49 40 0 10 20 30 40 50 60 70 PRESSURE (psi) 34 28 23 17 11 6 FLOW (m 3 h) 05 micron 02 micron Parker Hannifin Corporation Partek Operation Tucson AZ