PV16 3/4” Pneumatic PFA 3 Way Valve Product Overview The PV16 PFA diaphragm valve is designed for use in high purity semiconductor applications and is also ideally suited for ultrapure water and aggressive chemical or gas applications The design utilizes a molded high purity PFA body with precision machined seat and diaphragm sealing areas A one piece machined modified PTFE diaphragm is also utilized for excellent flexibility and life A full 3/4” orifice provides maximum flow capability in a compact package Features One piece precision machined diaphragm manufactured from the latest technology modified PTFE Provides over five times the flexural life as compared to conventional PTFE Tongue and groove seat and diaphragm for positive through flow shut off and diaphragm to body seal Halar coated stainless steel spring Benefits High cycle life Lower replacement costs Less downtime Reduces effects of corrosive environments Specifications Materials of Construction Wetted: PFA Modified PTFE Nonwetted: PVDF Viton PTFE coated SS spring 48 Pressure Ranges 0 120 PSIG (83 bar) See Cracking Pressure Chart on next page Actuation: 60 PSIG (41 bar) 120 PSIG (83 bar) Pressure ranges for operation at ambient temperatures For use at higher temperatures consult Pressure/Temperature chart on page 3 Temperature Ranges Ambient: 0° 150° F (17° 66° C) Fluid: 0° 266° F (17° 130° C) Parker Hannifin Corporation Partek Operation Tucson AZ

553 [1406 mm] 166 [422 mm] AIR PORT CONNECTION 1/8” FNPT TEST PORT CONNECTION 1/428 UNF B PV16 3/4” Pneumatic PFA 3 Way Valve 339 269 [862 mm] [684 mm] 49 Ø438 [Ø1113 mm] 4X 28 [71 mm] Ø375 [Ø953 mm] Model Number CVKV Flow Configuration Port Configuration PV163612 5 4 77 0 Parflare model numbers are supplied with PVDF nuts Also available with PFA (T) nuts *Ends are fused on PRESSURE TO OUTLET PORT (psi) 144 120 96 72 48 24 A BRACKETED DIMENSIONS ARE IN mm 4X 75˚ EQUALLY SPACED Dimensions A B 3 / 4" Parflare 5 54" [ 140 72 mm] 2 81" [ 71 37 mm] PV16361201 5 4 77 0 3 WAY 3 / 4" Parflare Long 6 48" [ 164 59 mm] 2 81" [ 71 37 mm] PV163616 7 3 1 04 1 COM NC NO 1 " Parflare* 9 12" [ 231 65 mm] 4 56" [ 115 82 mm] PV163712 7 3 104 1 3 / 4" Parbond 5 90" [ 149 86 mm] 2 95" [ 74 93 mm] PV164612 5 4 77 0 3 / 4" Parflare 5 54" [ 140 72 mm] 2 81" [ 71 37 mm] PV16461201 5 4 77 0 3 WAY Reversed Ports 3 / 4" Parflare Long 6 48" [ 164 59 mm] 2 81" [ 71 37 mm] PV164712 7 3 1 04 1 COM NO NC 1 " Parflare* 9 12" [ 231 65 mm] 4 56" [ 115 82 mm] PV164712 7 3 104 1 3 / 4" Parbond 5 90" [ 149 86 mm] 2 95" [ 74 93 mm] 0 24 CRACKING PRESSURE PRESSURE TO INLET PORT (bar) 17 33 50 66 83 99 99 SPECIFIED SEALING AREA 48 72 96 PRESSURE TO INLET PORT (psi) 120 144 83 66 50 33 17 PRESSURE TO OUTLET PORT (bar) DELTAP (psi) 60 50 40 30 20 10 0 10 PRESSURE DROP VS FLOW RATE FLOW RATE (lpm) 38 76 113 151 189 227 42 3/4" Parflare 3/4" Parbond 1" Parflare 35 20 30 FLOW RATE (gpm) 40 50 Parker Hannifin Corporation Partek Operation Tucson AZ 60 28 21 14 7 DELTAP (bar)